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SECOND CYCLE - MASTER'S DEGREE
THE GRADUATE SCHOOL OF NATURAL AND APPLIED SCIENCES
BIOMEDICAL ENGINEERING DEPARTMENT
1507 Biomedical Engineering
Course Information
Course Learning Outcomes
Course's Contribution To Program
ECTS Workload
Course Details
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COURSE INFORMATION
Course Code
Course Title
L+P Hour
Semester
ECTS
ELK 594
INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS
3 + 0
1st Semester
7,5
COURSE DESCRIPTION
Course Level
Master's Degree
Course Type
Elective
Course Objective
Microelectromechanical Systems (MEMS) technology providing machining of Silicon (Si) in the micro-level puts forth promising solutions to develop small, portable, robust and low-cost sensor systems. Today, MEMS technology has different implementations used in various areas ranging from automotive, biomedical, telecommunication, consumer electronics to military applications. The aims of this course are to introduce Microelectromechanical Systems and to give general understanding about the design and fabrication methods of the microstructures as well as different types of MEMS sensors and their sensing mechanism.
Course Content
Introduction of the properties of Silicon (Si) element, Silicon etching methods, photolithography, thin film deposition, bulk and surface micromachining, microstructure fabrication process and sensing mechanisms.
Prerequisites
No the prerequisite of lesson.
Corequisite
No the corequisite of lesson.
Mode of Delivery
Face to Face
COURSE LEARNING OUTCOMES
1
Students knows the basic concepts related with the MEMS technology.
2
Students are familiar with the fabrication methods used in the MEMS technology.
3
Students are familiar with the working principles and the different type of sensing mechanisms of MEMS sensor.
COURSE'S CONTRIBUTION TO PROGRAM
PO 01
PO 02
PO 03
PO 04
PO 05
PO 06
PO 07
PO 08
PO 09
PO 10
PO 11
PO 12
PO 13
PO 14
LO 001
LO 002
LO 003
Sub Total
Contribution
0
0
0
0
0
0
0
0
0
0
0
0
0
0
ECTS ALLOCATED BASED ON STUDENT WORKLOAD BY THE COURSE DESCRIPTION
Activities
Quantity
Duration (Hour)
Total Work Load (Hour)
Course Duration (14 weeks/theoric+practical)
14
3
42
Mid-terms
1
56
56
Final examination
1
56
56
Special Study Module (Student)
1
41
41
Total Work Load
ECTS Credit of the Course
195
7,5
COURSE DETAILS
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All Years
2019-2020 Spring
This course is not available in selected semester.
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L+P:
Lecture and Practice
PQ:
Program Learning Outcomes
LO:
Course Learning Outcomes
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Home Page
About University
Name And Address
Acedemic Authorities
General Discription
Academic Calendar
General Admission Requirements
Recognition of Prior Learning
General Registration Procedures
ECTS Credit Allocation
Academic Guidance
Information For Students
Cost Of Living
Accommodation
Meals
Medical Facilities
Facilities for Special Needs Students
Insurance
Financial Support for Students
Student Affairs
Learning Facilities
International Programs
Language Courses
Internships
Sports Facilities and Leisure Activities
Student Associations
Practical Information for Mobile Students
Degree Programmes