PAÜ .:. Eğitim Öğretim Bilgi Sistemi

COURSE INFORMATION

Course Code	Course Title	L+P Hour	Semester	ECTS
ELK 594	INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS	3 + 0	1st Semester	7,5

COURSE DESCRIPTION

Course Level	Doctorate Degree
Course Type	Elective
Course Objective	Microelectromechanical Systems (MEMS) technology providing machining of Silicon (Si) in the micro-level puts forth promising solutions to develop small, portable, robust and low-cost sensor systems. Today, MEMS technology has different implementations used in various areas ranging from automotive, biomedical, telecommunication, consumer electronics to military applications. The aims of this course are to introduce Microelectromechanical Systems and to give general understanding about the design and fabrication methods of the microstructures as well as different types of MEMS sensors and their sensing mechanism.
Course Content	Introduction of the properties of Silicon (Si) element, Silicon etching methods, photolithography, thin film deposition, bulk and surface micromachining, microstructure fabrication process and sensing mechanisms.
Prerequisites	No the prerequisite of lesson.
Corequisite	No the corequisite of lesson.
Mode of Delivery	Face to Face

COURSE LEARNING OUTCOMES

1	Students knows the basic concepts related with the MEMS technology.
2	Students are familiar with the fabrication methods used in the MEMS technology.
3	Students are familiar with the working principles and the different type of sensing mechanisms of MEMS sensor.

COURSE'S CONTRIBUTION TO PROGRAM

Data not found.

ECTS ALLOCATED BASED ON STUDENT WORKLOAD BY THE COURSE DESCRIPTION

Activities	Quantity	Duration (Hour)	Total Work Load (Hour)
Course Duration (14 weeks/theoric+practical)	14	3	42
Mid-terms	1	56	56
Final examination	1	56	56
Special Study Module (Student)	1	41	41
Total Work Load ECTS Credit of the Course			195 7,5

COURSE DETAILS

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L+P: Lecture and Practice
PQ: Program Learning Outcomes
LO: Course Learning Outcomes

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