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SECOND CYCLE - MASTER'S DEGREE
THE GRADUATE SCHOOL OF NATURAL AND APPLIED SCIENCES
PHYSICS DEPARTMENT
1401 Physics
Course Information
Course Learning Outcomes
Course's Contribution To Program
ECTS Workload
Course Details
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COURSE INFORMATION
Course Code
Course Title
L+P Hour
Semester
ECTS
FIZ 513
THIN FILM GROWTH TECHNOLOGY
3 + 0
1st Semester
7,5
COURSE DESCRIPTION
Course Level
Master's Degree
Course Type
Elective
Course Objective
The aim of this course is to teach thin film growth techniques by introducing definition of thin film and its properties. The advantages and disadvantages of these techniques will also be covered in this course
Course Content
Physics of Thin Films, Growth Process, Kinetics of Gases and Vacuum, Chemical, Physical and Other Growth Techniques, Thermal Evaporation, Sputtering, CSD,CVD, PECVD, PVD, E-Beam Evaporation, PLD, Arc-PVD, MBE, Structural, Optical, Electrical and Magnetic Properties of Thin Films, Characterization Techniques
Prerequisites
No the prerequisite of lesson.
Corequisite
No the corequisite of lesson.
Mode of Delivery
Face to Face
COURSE LEARNING OUTCOMES
1
To obtain information on thin film fabrication techniques.
COURSE'S CONTRIBUTION TO PROGRAM
PO 01
PO 02
PO 03
PO 04
PO 05
PO 06
PO 07
PO 08
PO 09
LO 001
4
3
4
Sub Total
4
3
4
Contribution
4
3
0
0
0
0
4
0
0
ECTS ALLOCATED BASED ON STUDENT WORKLOAD BY THE COURSE DESCRIPTION
Activities
Quantity
Duration (Hour)
Total Work Load (Hour)
Course Duration (14 weeks/theoric+practical)
14
3
42
Hours for off-the-classroom study (Pre-study, practice)
14
6
84
Mid-terms
1
30
30
Final examination
1
39
39
Total Work Load
ECTS Credit of the Course
195
7,5
COURSE DETAILS
Select Year
All Years
2017-2018 Spring
2016-2017 Spring
2014-2015 Fall
2011-2012 Fall
2010-2011 Spring
Course Term
No
Instructors
Details
2017-2018 Spring
1
KORAY YILMAZ
Details
2016-2017 Spring
1
KORAY YILMAZ
Details
2014-2015 Fall
1
KORAY YILMAZ
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Course Details
Course Code
Course Title
L+P Hour
Course Code
Language Of Instruction
Course Semester
FIZ 513
THIN FILM GROWTH TECHNOLOGY
3 + 0
1
Turkish
2017-2018 Spring
Course Coordinator
E-Mail
Phone Number
Course Location
Attendance
Prof. Dr. KORAY YILMAZ
kyilmaz@pau.edu.tr
FEN B0303
%80
Goals
The aim of this course is to teach thin film growth techniques by introducing definition of thin film and its properties. The advantages and disadvantages of these techniques will also be covered in this course
Content
Physics of Thin Films, Growth Process, Kinetics of Gases and Vacuum, Chemical, Physical and Other Growth Techniques, Thermal Evaporation, Sputtering, CSD,CVD, PECVD, PVD, E-Beam Evaporation, PLD, Arc-PVD, MBE, Structural, Optical, Electrical and Magnetic Properties of Thin Films, Characterization Techniques
Topics
Weeks
Topics
1
Physics of thin films
2
Growth process
3
PVD techniques
4
PVD techniques
5
PVD techniques
6
PVD techniques
7
Midterm exam
8
MBE
9
MBE
10
Chemical growth processes
11
Chemical growth processes
12
Chemical growth processes
13
Other techniques
14
Final exam
Materials
Materials are not specified.
Resources
Course Assessment
Assesment Methods
Percentage (%)
Assesment Methods Title
Final Exam
50
Final Exam
Midterm Exam
50
Midterm Exam
L+P:
Lecture and Practice
PQ:
Program Learning Outcomes
LO:
Course Learning Outcomes
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Home Page
About University
Name And Address
Acedemic Authorities
General Discription
Academic Calendar
General Admission Requirements
Recognition of Prior Learning
General Registration Procedures
ECTS Credit Allocation
Academic Guidance
Information For Students
Cost Of Living
Accommodation
Meals
Medical Facilities
Facilities for Special Needs Students
Insurance
Financial Support for Students
Student Affairs
Learning Facilities
International Programs
Language Courses
Internships
Sports Facilities and Leisure Activities
Student Associations
Practical Information for Mobile Students
Degree Programmes