PAÜ .:. Eğitim Öğretim Bilgi Sistemi

COURSE INFORMATION

Course Code	Course Title	L+P Hour	Semester	ECTS
FIZ 513	THIN FILM GROWTH TECHNOLOGY	3 + 0	2nd Semester	7,5

COURSE DESCRIPTION

Course Level	Master's Degree
Course Type	Elective
Course Objective	The aim of this course is to teach thin film growth techniques by introducing definition of thin film and its properties. The advantages and disadvantages of these techniques will also be covered in this course
Course Content	Physics of Thin Films, Growth Process, Kinetics of Gases and Vacuum, Chemical, Physical and Other Growth Techniques, Thermal Evaporation, Sputtering, CSD,CVD, PECVD, PVD, E-Beam Evaporation, PLD, Arc-PVD, MBE, Structural, Optical, Electrical and Magnetic Properties of Thin Films, Characterization Techniques
Prerequisites	No the prerequisite of lesson.
Corequisite	No the corequisite of lesson.
Mode of Delivery	Face to Face

COURSE LEARNING OUTCOMES

1	To obtain information on thin film fabrication techniques.

COURSE'S CONTRIBUTION TO PROGRAM

	PO 01	PO 02	PO 03	PO 04	PO 05	PO 06	PO 07	PO 08	PO 09
LO 001	4	3					4
Sub Total	4	3					4
Contribution	4	3	0	0	0	0	4	0	0

ECTS ALLOCATED BASED ON STUDENT WORKLOAD BY THE COURSE DESCRIPTION

Activities	Quantity	Duration (Hour)	Total Work Load (Hour)
Course Duration (14 weeks/theoric+practical)	14	3	42
Hours for off-the-classroom study (Pre-study, practice)	14	5	70
Assignments	2	10	20
Mid-terms	1	26	26
Final examination	1	37	37
Total Work Load ECTS Credit of the Course			195 7,5

COURSE DETAILS

Select Year

Course Details

Course Code	Course Title	L+P Hour	Course Code	Language Of Instruction	Course Semester
FIZ 513	THIN FILM GROWTH TECHNOLOGY	3 + 0	1	Turkish	2017-2018 Spring

Course Coordinator	E-Mail	Phone Number	Course Location	Attendance
Prof. Dr. KORAY YILMAZ	kyilmaz@pau.edu.tr		FEN B0303	%80

Goals		The aim of this course is to teach thin film growth techniques by introducing definition of thin film and its properties. The advantages and disadvantages of these techniques will also be covered in this course
Content		Physics of Thin Films, Growth Process, Kinetics of Gases and Vacuum, Chemical, Physical and Other Growth Techniques, Thermal Evaporation, Sputtering, CSD,CVD, PECVD, PVD, E-Beam Evaporation, PLD, Arc-PVD, MBE, Structural, Optical, Electrical and Magnetic Properties of Thin Films, Characterization Techniques

Topics

Materials

Materials are not specified.

Resources

Course Assessment

Assesment Methods	Percentage (%)	Assesment Methods Title
Final Exam	50	Final Exam
Midterm Exam	50	Midterm Exam

L+P: Lecture and Practice
PQ: Program Learning Outcomes
LO: Course Learning Outcomes

Prospective Student